Features
- Low drift
- 2 independent axes
- Continuous tilting
- Single mirror
- 2.0 x 2.5 mm² mirror
- High fill factor
Application
- Optical Beam Steering
- Reconfigurable Add-Drop Multiplexer
- Vibration control in free space optics
- Optical Processor


MEMs Electrostatic Steering Mirror, Large Static Deflection – The Sercalo MEMS 3D mirrors are used for precise optical beam steering.
Features
Application
| Name | TM2520 |
|---|---|
| Description | MEMs Electrostatic Steering Mirror, Large Static Deflection |
| Tilt Angle | X (Mechanical) @ 60 V = ± 4.5° / Y (Mechanical) @ 60 V = ±2.5° |
| Max Actuation Voltage | Typ. 60 V, Max 70 V |
| Reflectivity | (900-2000 nm) 95 % |
| Surface Finish | Gold or Aluminum |
| Mirror Size | X = 2400 µm, Y = 2000 µm |
| Resonance Frequency | X: 170 Hz / Y: 360 Hz |
| Package Style | TO5 |