MEMS micro-mirrors

MEMS micro-mirrors

MEMS micro-mirrors

Sercalo

Sercalo produces MEMS Micromirrors based on different technologies: Electrostatic driven MEMS mirrors are used in applications where a high pointing stability is required. The electrostatic drive has better DC performance and is the solution of choice for advanced fiber optic light processing such as in MEMS variable optical attenuators, fiber optic switches and tunable optical filters. Mirror diameters range from 0.8 mm up to 4.0 mm. The Magnetic MEMS micro-mirrors offer larger diameters and are best suited in applications requiring DC pointing together with dynamic scanning. Magnetic 1-d and 2-d micromirrors have a linear current angle response.

TM Series
Product Part NumberShort DescriptionTechnologyMirror DiameterPackage Style
TM10-10MEMS 3D Steering Mirror (1.0 mm diameter mirror) Electrostatic1.0mmTO46
TM2520MEMS 3D Steering Mirror (2.5mm x 2.0mm mirror)) Electrostatic2.5mmx2.0mmT05

Galvanometers
Product Part NumberShort DescriptionTechnologyResonance FrequencyMirror DiameterPackage Style
MM142-1-x1 Axis Magnetic DC MIRROR Magnetic200Hz14.2 mm27mmx23mmx8mm
MM142100-1-x1 Axis Magnetic DC MIRROR Magnetic250Hz14.2x10.0 mm23mmx21mmx8mm
MDU800-xMagnetic Deflection UnitMagnetic200Hz (X) ; 250Hz (Y)
MM-2536-2-xDual Axis Deflection UnitMagnetic180Hz2.5x3.6mm213mmx16mmx6.2mm