MEMS micro-mirrors

MEMS micro-mirrors
Sercalo produces MEMS Micromirrors based on different technologies: Electrostatic driven MEMS mirrors are used in applications where a high pointing stability is required. The electrostatic drive has better DC performance and is the solution of choice for advanced fiber optic light processing such as in MEMS variable optical attenuators, fiber optic switches and tunable optical filters. Mirror diameters range from 0.8 mm up to 4.0 mm. The Magnetic MEMS micro-mirrors offer larger diameters and are best suited in applications requiring DC pointing together with dynamic scanning. Magnetic 1-d and 2-d micromirrors have a linear current angle response.
Product Part Number | Short Description | Technology | Mirror Diameter | Package Style |
---|---|---|---|---|
TM10-10 | MEMS 3D Steering Mirror (1.0 mm diameter mirror) | Electrostatic | 1.0mm | TO46 |
TM2520 | MEMS 3D Steering Mirror (2.5mm x 2.0mm mirror)) | Electrostatic | 2.5mmx2.0mm | T05 |
Product Part Number | Short Description | Technology | Resonance Frequency | Mirror Diameter | Package Style |
---|---|---|---|---|---|
MM142-1-x | 1 Axis Magnetic DC MIRROR | Magnetic | 200Hz | 14.2 mm | 27mmx23mmx8mm |
MM142100-1-x | 1 Axis Magnetic DC MIRROR | Magnetic | 250Hz | 14.2x10.0 mm | 23mmx21mmx8mm |
MDU800-x | Magnetic Deflection Unit | Magnetic | 200Hz (X) ; 250Hz (Y) | ||
MM-2536-2-x | Dual Axis Deflection Unit | Magnetic | 180Hz | 2.5x3.6mm2 | 13mmx16mmx6.2mm |